Wet Process Development Engineer

OtherProcess Development Engineer

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Requirements Summary

Module Integration: Develop and optimize wet process flows for SiGe epi-layer cleaning

Technical Tools

OtherProcess Development Engineer

~1 min read

→Module Integration: Develop and optimize wet process flows for SiGe epi-layer cleaning and selective removal without damage to underlying Si or gate oxide
→Selective Etching: Define chemistries for high-precision isotropic and anisotropic etching with focus on SiGe/Si/silicided film selectivity and undercut control at 28nm geometries
→Yield & Defectivity: Identify root causes of process-related defects using FMEA and 8D methodologies; implement Statistical Process Control (SPC) to support the 28nm yield ramp toward high-volume manufacturing
→Cross-Functional Collaboration: Partner with Epi, Lithography, Spacer Films, and CMP teams to ensure seamless integration of wet modules into the full 28nm SiGe and silicidation fabrication flow
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Metrology & Characterization: Utilize SEM, TEM, ellipsometry, and AFM to characterize surface roughness and etch profiles at atomic resolution

This role requires the ability to manage multiple parallel workstreams under schedule pressure, lead technical discussions with authority, communicate status and risks clearly, and drive alignment across organizational boundaries in a fast-paced technology development environment.

~1 min read

Master’s or Ph.D. in Materials Science, Chemical Engineering, Electrical Engineering, Physics, or related field
5+ years in R&D semiconductor wafer fabrication for advanced nodes (28nm or below)
Technical depth in:
- SiGe device physics, surface preparation, and chemical reaction kinetics
- Wet etch chemistries across a broad range of film types
- Hands-on experience with single-wafer or batch wet process tools (LAM, TEL, SCREEN, or equivalent)
- Design of Experiments (DOE) methodology
- Leading cross-functional teams from concept to production-ready status

Experience developing new wet process modules from the ground up
Strong inline-to-end-of-line signal correlation and process characterization skills
Ability to build and maintain stakeholder relationships across internal and external partners
Strong verbal and written communication skills
Demonstrated ability to ramp quickly on new systems and processes